FMA-873A-V流量计 美国omega
适用于所有洁净气体的高流速质量控制器和仪表 FMA-700A and FMA-800A 适用于所有洁净气体的高流速质量控制器和仪表
±1%精度（500 SLM），0.2%的可重复性 ± 低成本 对于流量达1000 SLM 为增加**性 常闭阀 快速响应 高度不敏感 可移动的传感管组件 欧米茄?fma-700a和800A系列质量流量计和控制器延长质量流量测量和控制的范围从0到5 sccm的1000 SLM 50:1的调节能力。像所有的质量流量传感器，这些新的单位质量流量的直接测量，无需温度或压力修正。 在加热循环管的工作原理传感器系列fma-700a和800A。单位功能的耐腐蚀不锈钢和氟橡胶结构和325目（44微米）入口滤网防止传感器污染。流阀体和阀泄漏小于10-8大气压氦气CC /秒。万一断电，阀是常闭的。 fma-78p4 fma-78p2和2的和4通道读出/电源/设定值控制电子盒使用fma-700a和800A系列质量流量传感器。单位以0到102.4%全尺寸显示，一个±15 VDC电源，设定电位器（质量流量控制器），电源线，和一个电连接器连接的电子盒的输出。 fma-78p系列的率指标/电子封装也有背面板混合控制开关选择独立/从操作的每个通道（通道1是主），和单位包括0至5伏直流电输出的每个通道的记录，数据采集，或计算机接口。
规格
Accuracy: ±1% full scale (up to 500 SLM), ±2% full scale for 750 to 1000 SLM Repeatability: ±0.2% full scale Turndown Ratio: 50:1 Response Time: 2.0 seconds Analog Setpoint: 0 to 5 Vdc: Voltage output models 4 to 20 mA: Current output models Linear Output: Standard: 0 to 5 Vdc into 2000 Ω min. Optional: 4 to 20 mA, into 200 to 750 Ω Max Pressure: ??FMA-760A to FMA-772A: 1000 psig FMA-773A to 778A: 200 psig ??FMA-860A to FMA-874A: 1500 psig FMA-875A to FMA-878A: 1000 psig ?? For maximum pressures up to 3000 psig, consult Flow Engineering for quote. Pressure Coefficient: 0.1% typical Differential Pressure: FMA-800A Series: 0.5 psid FMA-700A Series: No less than 20% of supply pressure, depending on parameters Temperature Range (Gas and Ambient): -10 to 70°C (14 to 158°F) Temperature Coefficient: 0.05% full scale/°C Wetted Parts: 316 SS body and sensing tube assembly, FKM elastomers, other materials available POWER Voltage Output Models: 12 Vdc (±5%) or 15 Vdc (±10%) mA Output Models: 15 Vdc (±5%) or 24 Vdc (±15%) Current Consumption: FMA-800A: <45 mA DC FMA-700A: <250 mA DC
产品型号/产品描述 Mass Flowmeters with Compression Fitting Connections FMA-860A-V 1/8" 5 SCCM FMA-861A-V 1/4" 10 SCCM FMA-861-V 1/4" 10 SCCM, requires ±15 Vdc power supply FMA-862A-V 1/4" 20 SCCM FMA-862-V 1/4" 20 SCCM, requires ±15 Vdc power supply FMA-863A-V 1/4" 50 SCCM FMA-864A-V 1/4" 100 SCCM FMA-865A-V 1/4" 200 SCCM FMA-866A-V 1/4" 500 SCCM FMA-867A-V 1/4" 1 SLM FMA-868A-V 1/4" 2 SLM FMA-869A-V 1/4" 5 SLM FMA-870A-V 1/4" 10 SLM FMA-871A-V 1/4" 15 SLM FMA-871-V 1/4" 15 SLM, requires ±15 Vdc power supply FMA-872A-V 1/4" 20 SLM FMA-873A-V 1/4" 50 SLM FMA-874A-V 1/4" 100 SLM FMA-875A-V 3/8" 200 SLM FMA-876A-V 3/8" 500 SLM FMA-877A-V 1/2" 750 SLM FMA-878A-V 3/4" 1000 SLM Mass Flow Controllers with Compression Fitting Connections FMA-760A-V-(*) 1/8" 5 SCCM FMA-761A-V-(*) 1/4" 10 SCCM FMA-762A-V-(*) 1/4" 20 SCCM FMA-763A-V-(*) 1/4" 50 SCCM FMA-764A-V-(*) 1/4" 100 SCCM FMA-765A-V-(*) 1/4" 200 SCCM FMA-766A-V-(*) 1/4" 500 SCCM FMA-767A-V-(*) 1/4" 1 SLM FMA-768A-V-(*) 1/4" 2 SLM FMA-769A-V-(*) 1/4" 5 SLM FMA-770A-V-(*) 1/4" 10 SLM FMA-771A-V-(*) 1/4" 15 SLM FMA-772A-V-(*) 1/4" 20 SLM FMA-773A-V-(*) 1/4" 50 SLM FMA-774A-V-(*) 1/4" 100 SLM FMA-775A-V-(*) 3/8" 200 SLM FMA-776A-V-(*) 3/8" 500 SLM FMA-777A-V-(*) 1/2" 750 SLM FMA-778A-V(*) 3/4" 1000 SLM Electronic Boxes for voltage output units only FMA-78P2 For up to 2 sensors? FMA-78P4 For up to 4 sensors? Accessories FMA-78C10 10' interconnecting cable with connectors FMA-78C25 25' interconnecting cable with connectors FMA-78C50 50' interconnecting cable with connectors FPW-15 15 Vdc power supply for "A" version only
注释: Comes complete with operator's manual and mating connector. (*)Replace asterisk in part number with gas name and inlet/outlet pressure. For 4-20 mA output replace the "-V" suffix with "-I", no additional cost. NOTE: All flow ranges are specified for Nitrogen or Air. when used for other gases, a correlation factor is used to determine flow rate. Calibrations done at ambient temperature only (20° or 70°F) For NIST calibration, add suffix, "-NIST" to model number, add $250 to cost. ?? For maximum pressures up to 3000 pounds, consult Flow Engineering for a quote. (OPTIONS SHOWN IN THIS "NOTE" ABOVE ARE PRICED IN US$)
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