Delta-F100 TO-CAN焦距量测系统
产品简介
Delta-F100 TO-CAN焦距量测系统
产品详细信息
Alignment System |
X Travel Range:20mm, Resolution:0.0125um / pulse |
Y Travel Range:100mm, Resolution:0.0125um / pulse | |
Z Travel Range:50mm, Resolution:0.0125um / pulse | |
Tz Travel Range:360o Resolution:0.004o/ pulse? | |
Control System |
PC-BASED, Windows 2000 |
Power |
110VAC/ 1 phase 1kW |